JPS5257839A - Shearing interference system - Google Patents

Shearing interference system

Info

Publication number
JPS5257839A
JPS5257839A JP50133677A JP13367775A JPS5257839A JP S5257839 A JPS5257839 A JP S5257839A JP 50133677 A JP50133677 A JP 50133677A JP 13367775 A JP13367775 A JP 13367775A JP S5257839 A JPS5257839 A JP S5257839A
Authority
JP
Japan
Prior art keywords
interference system
shearing interference
mirros
beans
render
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50133677A
Other languages
Japanese (ja)
Other versions
JPS5953524B2 (en
Inventor
Tetsuo Sueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP50133677A priority Critical patent/JPS5953524B2/en
Publication of JPS5257839A publication Critical patent/JPS5257839A/en
Publication of JPS5953524B2 publication Critical patent/JPS5953524B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To render it possible to improve the precision of measurements with the use of a white light source by permitting two beans of light whose wave fronts progress in the directions reverse to each other on a common optical path to be reflected from a plurality of reflecting mirros having given angles of inclination by a beam splitter.
JP50133677A 1975-11-07 1975-11-07 Shearing information Expired JPS5953524B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50133677A JPS5953524B2 (en) 1975-11-07 1975-11-07 Shearing information

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50133677A JPS5953524B2 (en) 1975-11-07 1975-11-07 Shearing information

Publications (2)

Publication Number Publication Date
JPS5257839A true JPS5257839A (en) 1977-05-12
JPS5953524B2 JPS5953524B2 (en) 1984-12-25

Family

ID=15110297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50133677A Expired JPS5953524B2 (en) 1975-11-07 1975-11-07 Shearing information

Country Status (1)

Country Link
JP (1) JPS5953524B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006010599A (en) * 2004-06-29 2006-01-12 Matsushita Electric Ind Co Ltd Inspection method of lens characteristics and inspection apparatus of lens characteristics therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006010599A (en) * 2004-06-29 2006-01-12 Matsushita Electric Ind Co Ltd Inspection method of lens characteristics and inspection apparatus of lens characteristics therefor
JP4629372B2 (en) * 2004-06-29 2011-02-09 パナソニック株式会社 Lens wavefront aberration inspection method and lens wavefront aberration inspection apparatus used therefor

Also Published As

Publication number Publication date
JPS5953524B2 (en) 1984-12-25

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