JPS5257567U - - Google Patents
Info
- Publication number
- JPS5257567U JPS5257567U JP14405875U JP14405875U JPS5257567U JP S5257567 U JPS5257567 U JP S5257567U JP 14405875 U JP14405875 U JP 14405875U JP 14405875 U JP14405875 U JP 14405875U JP S5257567 U JPS5257567 U JP S5257567U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975144058U JPS5544355Y2 (cg-RX-API-DMAC7.html) | 1975-10-22 | 1975-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975144058U JPS5544355Y2 (cg-RX-API-DMAC7.html) | 1975-10-22 | 1975-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5257567U true JPS5257567U (cg-RX-API-DMAC7.html) | 1977-04-26 |
| JPS5544355Y2 JPS5544355Y2 (cg-RX-API-DMAC7.html) | 1980-10-17 |
Family
ID=28623806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975144058U Expired JPS5544355Y2 (cg-RX-API-DMAC7.html) | 1975-10-22 | 1975-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5544355Y2 (cg-RX-API-DMAC7.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54101738U (cg-RX-API-DMAC7.html) * | 1977-12-28 | 1979-07-18 | ||
| JPS57121134U (cg-RX-API-DMAC7.html) * | 1981-01-23 | 1982-07-28 | ||
| JPS6427844U (cg-RX-API-DMAC7.html) * | 1987-05-29 | 1989-02-17 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4802025B2 (ja) * | 2006-03-29 | 2011-10-26 | 株式会社ニューフレアテクノロジー | 基板のアース機構及び荷電粒子ビーム描画装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497700A (cg-RX-API-DMAC7.html) * | 1972-05-26 | 1974-01-23 | ||
| JPS4926477A (cg-RX-API-DMAC7.html) * | 1972-07-07 | 1974-03-08 |
-
1975
- 1975-10-22 JP JP1975144058U patent/JPS5544355Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497700A (cg-RX-API-DMAC7.html) * | 1972-05-26 | 1974-01-23 | ||
| JPS4926477A (cg-RX-API-DMAC7.html) * | 1972-07-07 | 1974-03-08 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54101738U (cg-RX-API-DMAC7.html) * | 1977-12-28 | 1979-07-18 | ||
| JPS57121134U (cg-RX-API-DMAC7.html) * | 1981-01-23 | 1982-07-28 | ||
| JPS6427844U (cg-RX-API-DMAC7.html) * | 1987-05-29 | 1989-02-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5544355Y2 (cg-RX-API-DMAC7.html) | 1980-10-17 |