JPS5256041U - - Google Patents
Info
- Publication number
- JPS5256041U JPS5256041U JP14297475U JP14297475U JPS5256041U JP S5256041 U JPS5256041 U JP S5256041U JP 14297475 U JP14297475 U JP 14297475U JP 14297475 U JP14297475 U JP 14297475U JP S5256041 U JPS5256041 U JP S5256041U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Special Conveying (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14297475U JPS5256041U (en) | 1975-10-22 | 1975-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14297475U JPS5256041U (en) | 1975-10-22 | 1975-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5256041U true JPS5256041U (en) | 1977-04-22 |
Family
ID=28622731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14297475U Pending JPS5256041U (en) | 1975-10-22 | 1975-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5256041U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5793307A (en) * | 1980-12-02 | 1982-06-10 | Olympus Optical Co Ltd | Automatic focusing system |
| JPS6266429A (en) * | 1985-09-19 | 1987-03-25 | Hitachi Ltd | System of correcting deviation of position of light spot irradiation |
| JPH02107119U (en) * | 1989-02-14 | 1990-08-27 | ||
| JP2007537606A (en) * | 2004-05-14 | 2007-12-20 | ザ・ビーオーシー・グループ・インコーポレーテッド | Apparatus and method for processing articles in a low pressure environment |
-
1975
- 1975-10-22 JP JP14297475U patent/JPS5256041U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5793307A (en) * | 1980-12-02 | 1982-06-10 | Olympus Optical Co Ltd | Automatic focusing system |
| JPS6266429A (en) * | 1985-09-19 | 1987-03-25 | Hitachi Ltd | System of correcting deviation of position of light spot irradiation |
| JPH02107119U (en) * | 1989-02-14 | 1990-08-27 | ||
| JP2007537606A (en) * | 2004-05-14 | 2007-12-20 | ザ・ビーオーシー・グループ・インコーポレーテッド | Apparatus and method for processing articles in a low pressure environment |