JPS525364B2 - - Google Patents
Info
- Publication number
- JPS525364B2 JPS525364B2 JP1257973A JP1257973A JPS525364B2 JP S525364 B2 JPS525364 B2 JP S525364B2 JP 1257973 A JP1257973 A JP 1257973A JP 1257973 A JP1257973 A JP 1257973A JP S525364 B2 JPS525364 B2 JP S525364B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257973A JPS525364B2 (zh) | 1973-01-31 | 1973-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257973A JPS525364B2 (zh) | 1973-01-31 | 1973-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49101913A JPS49101913A (zh) | 1974-09-26 |
| JPS525364B2 true JPS525364B2 (zh) | 1977-02-12 |
Family
ID=11809255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1257973A Expired JPS525364B2 (zh) | 1973-01-31 | 1973-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS525364B2 (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59139959A (ja) * | 1984-01-25 | 1984-08-11 | Kimitoshi Mato | 高速渦流気体による超微粒子発生用ノズル |
| JP3315611B2 (ja) * | 1996-12-02 | 2002-08-19 | 三菱電機株式会社 | 洗浄用２流体ジェットノズル及び洗浄装置ならびに半導体装置 |
-
1973
- 1973-01-31 JP JP1257973A patent/JPS525364B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49101913A (zh) | 1974-09-26 |