JPS5253462Y2 - - Google Patents

Info

Publication number
JPS5253462Y2
JPS5253462Y2 JP1974031115U JP3111574U JPS5253462Y2 JP S5253462 Y2 JPS5253462 Y2 JP S5253462Y2 JP 1974031115 U JP1974031115 U JP 1974031115U JP 3111574 U JP3111574 U JP 3111574U JP S5253462 Y2 JPS5253462 Y2 JP S5253462Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1974031115U
Other languages
Japanese (ja)
Other versions
JPS50121760U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974031115U priority Critical patent/JPS5253462Y2/ja
Publication of JPS50121760U publication Critical patent/JPS50121760U/ja
Application granted granted Critical
Publication of JPS5253462Y2 publication Critical patent/JPS5253462Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Indicating Measured Values (AREA)
  • Optical Transform (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP1974031115U 1974-03-18 1974-03-18 Expired JPS5253462Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974031115U JPS5253462Y2 (cs) 1974-03-18 1974-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974031115U JPS5253462Y2 (cs) 1974-03-18 1974-03-18

Publications (2)

Publication Number Publication Date
JPS50121760U JPS50121760U (cs) 1975-10-04
JPS5253462Y2 true JPS5253462Y2 (cs) 1977-12-05

Family

ID=28139809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974031115U Expired JPS5253462Y2 (cs) 1974-03-18 1974-03-18

Country Status (1)

Country Link
JP (1) JPS5253462Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3742229A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask alignment system

Also Published As

Publication number Publication date
JPS50121760U (cs) 1975-10-04

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