JPS5253256A - Manufacturing of thin film capacitor - Google Patents

Manufacturing of thin film capacitor

Info

Publication number
JPS5253256A
JPS5253256A JP50129155A JP12915575A JPS5253256A JP S5253256 A JPS5253256 A JP S5253256A JP 50129155 A JP50129155 A JP 50129155A JP 12915575 A JP12915575 A JP 12915575A JP S5253256 A JPS5253256 A JP S5253256A
Authority
JP
Japan
Prior art keywords
manufacturing
thin film
film capacitor
capacitor
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50129155A
Other languages
Japanese (ja)
Inventor
Toshirou Sasamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP50129155A priority Critical patent/JPS5253256A/en
Publication of JPS5253256A publication Critical patent/JPS5253256A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP50129155A 1975-10-27 1975-10-27 Manufacturing of thin film capacitor Pending JPS5253256A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50129155A JPS5253256A (en) 1975-10-27 1975-10-27 Manufacturing of thin film capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50129155A JPS5253256A (en) 1975-10-27 1975-10-27 Manufacturing of thin film capacitor

Publications (1)

Publication Number Publication Date
JPS5253256A true JPS5253256A (en) 1977-04-28

Family

ID=15002492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50129155A Pending JPS5253256A (en) 1975-10-27 1975-10-27 Manufacturing of thin film capacitor

Country Status (1)

Country Link
JP (1) JPS5253256A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212492A (en) * 2009-03-11 2010-09-24 Tokyo Electron Ltd Method of manufacturing semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010212492A (en) * 2009-03-11 2010-09-24 Tokyo Electron Ltd Method of manufacturing semiconductor device

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