JPS5252475A - Cleaning system - Google Patents

Cleaning system

Info

Publication number
JPS5252475A
JPS5252475A JP12952475A JP12952475A JPS5252475A JP S5252475 A JPS5252475 A JP S5252475A JP 12952475 A JP12952475 A JP 12952475A JP 12952475 A JP12952475 A JP 12952475A JP S5252475 A JPS5252475 A JP S5252475A
Authority
JP
Japan
Prior art keywords
cleaning
cleaning system
cleaning liquid
purity
maintained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12952475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5542871B2 (enExample
Inventor
Masao Kachi
Hiroshi Asami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP12952475A priority Critical patent/JPS5252475A/ja
Publication of JPS5252475A publication Critical patent/JPS5252475A/ja
Publication of JPS5542871B2 publication Critical patent/JPS5542871B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP12952475A 1975-10-27 1975-10-27 Cleaning system Granted JPS5252475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12952475A JPS5252475A (en) 1975-10-27 1975-10-27 Cleaning system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12952475A JPS5252475A (en) 1975-10-27 1975-10-27 Cleaning system

Publications (2)

Publication Number Publication Date
JPS5252475A true JPS5252475A (en) 1977-04-27
JPS5542871B2 JPS5542871B2 (enExample) 1980-11-01

Family

ID=15011625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12952475A Granted JPS5252475A (en) 1975-10-27 1975-10-27 Cleaning system

Country Status (1)

Country Link
JP (1) JPS5252475A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100446189C (zh) * 2000-09-05 2008-12-24 东京応化工业株式会社 洗涤液的供给系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100446189C (zh) * 2000-09-05 2008-12-24 东京応化工业株式会社 洗涤液的供给系统

Also Published As

Publication number Publication date
JPS5542871B2 (enExample) 1980-11-01

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