JPS5251203A - Photooetching method - Google Patents

Photooetching method

Info

Publication number
JPS5251203A
JPS5251203A JP12652475A JP12652475A JPS5251203A JP S5251203 A JPS5251203 A JP S5251203A JP 12652475 A JP12652475 A JP 12652475A JP 12652475 A JP12652475 A JP 12652475A JP S5251203 A JPS5251203 A JP S5251203A
Authority
JP
Japan
Prior art keywords
photooetching
photooetching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12652475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5424296B2 (enExample
Inventor
Takeshi Umegaki
Chiyuukei Kaneko
Shiyouichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP12652475A priority Critical patent/JPS5251203A/ja
Publication of JPS5251203A publication Critical patent/JPS5251203A/ja
Publication of JPS5424296B2 publication Critical patent/JPS5424296B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP12652475A 1975-10-20 1975-10-20 Photooetching method Granted JPS5251203A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12652475A JPS5251203A (en) 1975-10-20 1975-10-20 Photooetching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12652475A JPS5251203A (en) 1975-10-20 1975-10-20 Photooetching method

Publications (2)

Publication Number Publication Date
JPS5251203A true JPS5251203A (en) 1977-04-25
JPS5424296B2 JPS5424296B2 (enExample) 1979-08-20

Family

ID=14937328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12652475A Granted JPS5251203A (en) 1975-10-20 1975-10-20 Photooetching method

Country Status (1)

Country Link
JP (1) JPS5251203A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991177A (enExample) * 1972-12-29 1974-08-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991177A (enExample) * 1972-12-29 1974-08-30

Also Published As

Publication number Publication date
JPS5424296B2 (enExample) 1979-08-20

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