JPS5250209U - - Google Patents

Info

Publication number
JPS5250209U
JPS5250209U JP13650375U JP13650375U JPS5250209U JP S5250209 U JPS5250209 U JP S5250209U JP 13650375 U JP13650375 U JP 13650375U JP 13650375 U JP13650375 U JP 13650375U JP S5250209 U JPS5250209 U JP S5250209U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13650375U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13650375U priority Critical patent/JPS5250209U/ja
Publication of JPS5250209U publication Critical patent/JPS5250209U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Drying Of Solid Materials (AREA)
JP13650375U 1975-10-06 1975-10-06 Pending JPS5250209U (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13650375U JPS5250209U (sv) 1975-10-06 1975-10-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13650375U JPS5250209U (sv) 1975-10-06 1975-10-06

Publications (1)

Publication Number Publication Date
JPS5250209U true JPS5250209U (sv) 1977-04-09

Family

ID=28616481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13650375U Pending JPS5250209U (sv) 1975-10-06 1975-10-06

Country Status (1)

Country Link
JP (1) JPS5250209U (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020017603A (ja) * 2018-07-25 2020-01-30 株式会社Ｓｃｒｅｅｎホールディングス 減圧乾燥装置、基板処理装置および減圧乾燥方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4815865U (sv) * 1971-07-04 1973-02-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4815865U (sv) * 1971-07-04 1973-02-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020017603A (ja) * 2018-07-25 2020-01-30 株式会社Ｓｃｒｅｅｎホールディングス 減圧乾燥装置、基板処理装置および減圧乾燥方法

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