JPS5250209U - - Google Patents
Info
- Publication number
- JPS5250209U JPS5250209U JP13650375U JP13650375U JPS5250209U JP S5250209 U JPS5250209 U JP S5250209U JP 13650375 U JP13650375 U JP 13650375U JP 13650375 U JP13650375 U JP 13650375U JP S5250209 U JPS5250209 U JP S5250209U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13650375U JPS5250209U (pt) | 1975-10-06 | 1975-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13650375U JPS5250209U (pt) | 1975-10-06 | 1975-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5250209U true JPS5250209U (pt) | 1977-04-09 |
Family
ID=28616481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13650375U Pending JPS5250209U (pt) | 1975-10-06 | 1975-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5250209U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020017603A (ja) * | 2018-07-25 | 2020-01-30 | 株式会社Ｓｃｒｅｅｎホールディングス | 減圧乾燥装置、基板処理装置および減圧乾燥方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4815865U (pt) * | 1971-07-04 | 1973-02-22 |
-
1975
- 1975-10-06 JP JP13650375U patent/JPS5250209U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4815865U (pt) * | 1971-07-04 | 1973-02-22 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020017603A (ja) * | 2018-07-25 | 2020-01-30 | 株式会社Ｓｃｒｅｅｎホールディングス | 減圧乾燥装置、基板処理装置および減圧乾燥方法 |