JPS5246514B2 - - Google Patents

Info

Publication number
JPS5246514B2
JPS5246514B2 JP47009866A JP986672A JPS5246514B2 JP S5246514 B2 JPS5246514 B2 JP S5246514B2 JP 47009866 A JP47009866 A JP 47009866A JP 986672 A JP986672 A JP 986672A JP S5246514 B2 JPS5246514 B2 JP S5246514B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47009866A
Other languages
Japanese (ja)
Other versions
JPS4879693A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47009866A priority Critical patent/JPS5246514B2/ja
Priority to DE2304159A priority patent/DE2304159A1/en
Priority to US00327683A priority patent/US3840743A/en
Publication of JPS4879693A publication Critical patent/JPS4879693A/ja
Publication of JPS5246514B2 publication Critical patent/JPS5246514B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP47009866A 1972-01-28 1972-01-28 Expired JPS5246514B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP47009866A JPS5246514B2 (en) 1972-01-28 1972-01-28
DE2304159A DE2304159A1 (en) 1972-01-28 1973-01-29 ION MICROANALYZER
US00327683A US3840743A (en) 1972-01-28 1973-01-29 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47009866A JPS5246514B2 (en) 1972-01-28 1972-01-28

Publications (2)

Publication Number Publication Date
JPS4879693A JPS4879693A (en) 1973-10-25
JPS5246514B2 true JPS5246514B2 (en) 1977-11-25

Family

ID=11732047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47009866A Expired JPS5246514B2 (en) 1972-01-28 1972-01-28

Country Status (3)

Country Link
US (1) US3840743A (en)
JP (1) JPS5246514B2 (en)
DE (1) DE2304159A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551931Y2 (en) * 1976-12-08 1980-12-03

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015594A (en) * 1973-06-08 1975-02-19
US3916190A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Depth profile analysis apparatus
US3937958A (en) * 1975-03-31 1976-02-10 Minnesota Mining And Manufacturing Company Charged particle beam apparatus
JPS5728396Y2 (en) * 1975-06-24 1982-06-21
JPS5836464B2 (en) * 1975-09-12 1983-08-09 株式会社島津製作所 sekisouchi
SE440600B (en) * 1979-05-17 1985-08-12 Scanditronix Instr DEVICE FOR IRRATION OF A MATERIAL VOLUME WITH A RADIATION OF LOADED PARTICLES
US4874946A (en) * 1985-04-30 1989-10-17 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices
US5089699A (en) * 1989-03-14 1992-02-18 Hitachi, Ltd. Secondary charged particle analyzing apparatus and secondary charged particle extracting section
US5019712A (en) * 1989-06-08 1991-05-28 Hughes Aircraft Company Production of focused ion cluster beams
EP0523033A1 (en) * 1991-07-10 1993-01-13 IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H. Ion optical imaging system
JP3396980B2 (en) * 1994-12-22 2003-04-14 ソニー株式会社 Analysis method of concentration distribution
US10473599B2 (en) * 2017-12-01 2019-11-12 Bruker Axs Gmbh X-ray source using electron impact excitation of high velocity liquid metal beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551931Y2 (en) * 1976-12-08 1980-12-03

Also Published As

Publication number Publication date
DE2304159A1 (en) 1973-08-23
JPS4879693A (en) 1973-10-25
US3840743A (en) 1974-10-08

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