JPS5245403A - Exposure method - Google Patents

Exposure method

Info

Publication number
JPS5245403A
JPS5245403A JP50084480A JP8448075A JPS5245403A JP S5245403 A JPS5245403 A JP S5245403A JP 50084480 A JP50084480 A JP 50084480A JP 8448075 A JP8448075 A JP 8448075A JP S5245403 A JPS5245403 A JP S5245403A
Authority
JP
Japan
Prior art keywords
exposure method
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50084480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5432361B2 (show.php
Inventor
Hiroshi Yanagisawa
Norio Hasegawa
Kikuo Douta
Takahiro Kobashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50084480A priority Critical patent/JPS5245403A/ja
Publication of JPS5245403A publication Critical patent/JPS5245403A/ja
Publication of JPS5432361B2 publication Critical patent/JPS5432361B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP50084480A 1975-07-11 1975-07-11 Exposure method Granted JPS5245403A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50084480A JPS5245403A (en) 1975-07-11 1975-07-11 Exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50084480A JPS5245403A (en) 1975-07-11 1975-07-11 Exposure method

Publications (2)

Publication Number Publication Date
JPS5245403A true JPS5245403A (en) 1977-04-09
JPS5432361B2 JPS5432361B2 (show.php) 1979-10-13

Family

ID=13831798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50084480A Granted JPS5245403A (en) 1975-07-11 1975-07-11 Exposure method

Country Status (1)

Country Link
JP (1) JPS5245403A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002427A (en) * 1988-08-20 1991-03-26 Nisshoku Corporation Hydrophobic material used for drainage of culvert

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002427A (en) * 1988-08-20 1991-03-26 Nisshoku Corporation Hydrophobic material used for drainage of culvert

Also Published As

Publication number Publication date
JPS5432361B2 (show.php) 1979-10-13

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