JPS5245155Y2 - - Google Patents
Info
- Publication number
- JPS5245155Y2 JPS5245155Y2 JP6827473U JP6827473U JPS5245155Y2 JP S5245155 Y2 JPS5245155 Y2 JP S5245155Y2 JP 6827473 U JP6827473 U JP 6827473U JP 6827473 U JP6827473 U JP 6827473U JP S5245155 Y2 JPS5245155 Y2 JP S5245155Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6827473U JPS5245155Y2 (en:Method) | 1973-06-08 | 1973-06-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6827473U JPS5245155Y2 (en:Method) | 1973-06-08 | 1973-06-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5014357U JPS5014357U (en:Method) | 1975-02-14 |
JPS5245155Y2 true JPS5245155Y2 (en:Method) | 1977-10-14 |
Family
ID=28235097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6827473U Expired JPS5245155Y2 (en:Method) | 1973-06-08 | 1973-06-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5245155Y2 (en:Method) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5268663U (en:Method) * | 1975-11-15 | 1977-05-21 | ||
JPS5532887Y2 (en:Method) * | 1976-12-15 | 1980-08-05 | ||
JPS53156379U (en:Method) * | 1977-05-14 | 1978-12-08 | ||
JPS5940879A (ja) * | 1982-09-01 | 1984-03-06 | 富士護謨産業株式会社 | 吸水具 |
JPS5989432A (ja) * | 1982-11-15 | 1984-05-23 | Toshiba Corp | ウエハ−整列方法及びその整列装置 |
-
1973
- 1973-06-08 JP JP6827473U patent/JPS5245155Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5014357U (en:Method) | 1975-02-14 |