JPS5243448U - - Google Patents

Info

Publication number
JPS5243448U
JPS5243448U JP12971675U JP12971675U JPS5243448U JP S5243448 U JPS5243448 U JP S5243448U JP 12971675 U JP12971675 U JP 12971675U JP 12971675 U JP12971675 U JP 12971675U JP S5243448 U JPS5243448 U JP S5243448U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12971675U
Other languages
Japanese (ja)
Other versions
JPS5328444Y2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12971675U priority Critical patent/JPS5328444Y2/ja
Publication of JPS5243448U publication Critical patent/JPS5243448U/ja
Application granted granted Critical
Publication of JPS5328444Y2 publication Critical patent/JPS5328444Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12971675U 1975-09-23 1975-09-23 Expired JPS5328444Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12971675U JPS5328444Y2 (it) 1975-09-23 1975-09-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12971675U JPS5328444Y2 (it) 1975-09-23 1975-09-23

Publications (2)

Publication Number Publication Date
JPS5243448U true JPS5243448U (it) 1977-03-28
JPS5328444Y2 JPS5328444Y2 (it) 1978-07-18

Family

ID=28610009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12971675U Expired JPS5328444Y2 (it) 1975-09-23 1975-09-23

Country Status (1)

Country Link
JP (1) JPS5328444Y2 (it)

Also Published As

Publication number Publication date
JPS5328444Y2 (it) 1978-07-18

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