JPS5242591B2 - - Google Patents

Info

Publication number
JPS5242591B2
JPS5242591B2 JP12250272A JP12250272A JPS5242591B2 JP S5242591 B2 JPS5242591 B2 JP S5242591B2 JP 12250272 A JP12250272 A JP 12250272A JP 12250272 A JP12250272 A JP 12250272A JP S5242591 B2 JPS5242591 B2 JP S5242591B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12250272A
Other languages
Japanese (ja)
Other versions
JPS4979768A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12250272A priority Critical patent/JPS5242591B2/ja
Priority to US423107A priority patent/US3928783A/en
Publication of JPS4979768A publication Critical patent/JPS4979768A/ja
Publication of JPS5242591B2 publication Critical patent/JPS5242591B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment

Landscapes

  • Solid Thermionic Cathode (AREA)
JP12250272A 1972-12-08 1972-12-08 Expired JPS5242591B2 (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12250272A JPS5242591B2 (zh) 1972-12-08 1972-12-08
US423107A US3928783A (en) 1972-12-08 1973-12-10 Thermionic cathode heated by electron bombardment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12250272A JPS5242591B2 (zh) 1972-12-08 1972-12-08

Publications (2)

Publication Number Publication Date
JPS4979768A JPS4979768A (zh) 1974-08-01
JPS5242591B2 true JPS5242591B2 (zh) 1977-10-25

Family

ID=14837418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12250272A Expired JPS5242591B2 (zh) 1972-12-08 1972-12-08

Country Status (2)

Country Link
US (1) US3928783A (zh)
JP (1) JPS5242591B2 (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127562A (zh) * 1973-04-06 1974-12-06
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
US4054946A (en) * 1976-09-28 1977-10-18 Bell Telephone Laboratories, Incorporated Electron source of a single crystal of lanthanum hexaboride emitting surface of (110) crystal plane
US4115720A (en) * 1977-03-31 1978-09-19 Rca Corporation Device having thermionic cathode heated by field-emitted electrons
US4137476A (en) * 1977-05-18 1979-01-30 Denki Kagaku Kogyo Kabushiki Kaisha Thermionic cathode
US4258283A (en) * 1978-08-31 1981-03-24 Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten Cathode for electron emission
US4297615A (en) * 1979-03-19 1981-10-27 The Regents Of The University Of California High current density cathode structure
US4438557A (en) * 1979-05-01 1984-03-27 Woodland International Corporation Method of using an areal array of tubular electron sources
US4333035A (en) * 1979-05-01 1982-06-01 Woodland International Corporation Areal array of tubular electron sources
US4288717A (en) * 1979-11-06 1981-09-08 Denki Kagaku Kogyo Kabushiki Kaisha Thermionic cathode apparatus
JPS58225537A (ja) * 1982-06-25 1983-12-27 Hitachi Ltd イオン源装置
JP2000011853A (ja) * 1998-06-24 2000-01-14 Advantest Corp 電子銃、その長寿命化方法、電子機器
EP3090439B1 (en) 2013-12-30 2020-06-24 ASML Netherlands B.V. Cathode arrangement, electron gun, and lithography system comprising such electron gun
WO2019172433A1 (en) * 2018-03-09 2019-09-12 Atonarp Inc. Device including an ionizer
EP3794626A1 (en) * 2018-03-23 2021-03-24 Freemelt Ab Cathode assembly for electron gun
US11094493B2 (en) * 2019-08-01 2021-08-17 Lockheed Martin Corporation Emitter structures for enhanced thermionic emission
US11380511B2 (en) * 2020-03-24 2022-07-05 Fei Company Charged particle beam source

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1210678A (en) * 1915-05-19 1917-01-02 Western Electric Co Thermionic amplifier.
US2159824A (en) * 1936-12-01 1939-05-23 Hans J Spanner Discharge device
US2386790A (en) * 1944-11-29 1945-10-16 Sylvania Electric Prod Electron gun and the like
US2585582A (en) * 1949-07-07 1952-02-12 Bell Telephone Labor Inc Electron gun
US2561768A (en) * 1950-04-10 1951-07-24 Zenith Radio Corp Thermionic cathode activation
US3333138A (en) * 1965-01-11 1967-07-25 Rauland Corp Support assembly for a low-wattage cathode
US3369145A (en) * 1965-04-09 1968-02-13 Wagner Electric Corp Thermionic emissive cathode
DE1251876B (zh) * 1965-12-23
US3440475A (en) * 1967-04-11 1969-04-22 Lokomotivbau Elektrotech Lanthanum hexaboride cathode system for an electron beam generator
US3621324A (en) * 1968-11-05 1971-11-16 Westinghouse Electric Corp High-power cathode
US3727093A (en) * 1971-01-20 1973-04-10 Westinghouse Electric Corp Electron beam apparatus

Also Published As

Publication number Publication date
US3928783A (en) 1975-12-23
JPS4979768A (zh) 1974-08-01

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