JPS5242591B2 - - Google Patents
Info
- Publication number
- JPS5242591B2 JPS5242591B2 JP12250272A JP12250272A JPS5242591B2 JP S5242591 B2 JPS5242591 B2 JP S5242591B2 JP 12250272 A JP12250272 A JP 12250272A JP 12250272 A JP12250272 A JP 12250272A JP S5242591 B2 JPS5242591 B2 JP S5242591B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
Landscapes
- Solid Thermionic Cathode (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12250272A JPS5242591B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-12-08 | 1972-12-08 | |
| US423107A US3928783A (en) | 1972-12-08 | 1973-12-10 | Thermionic cathode heated by electron bombardment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12250272A JPS5242591B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-12-08 | 1972-12-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4979768A JPS4979768A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-08-01 |
| JPS5242591B2 true JPS5242591B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-10-25 |
Family
ID=14837418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12250272A Expired JPS5242591B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-12-08 | 1972-12-08 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3928783A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
| JP (1) | JPS5242591B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49127562A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-04-06 | 1974-12-06 | ||
| US4055780A (en) * | 1975-04-10 | 1977-10-25 | National Institute For Researches In Inorganic Materials | Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride |
| US4054946A (en) * | 1976-09-28 | 1977-10-18 | Bell Telephone Laboratories, Incorporated | Electron source of a single crystal of lanthanum hexaboride emitting surface of (110) crystal plane |
| US4115720A (en) * | 1977-03-31 | 1978-09-19 | Rca Corporation | Device having thermionic cathode heated by field-emitted electrons |
| US4137476A (en) * | 1977-05-18 | 1979-01-30 | Denki Kagaku Kogyo Kabushiki Kaisha | Thermionic cathode |
| US4258283A (en) * | 1978-08-31 | 1981-03-24 | Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten | Cathode for electron emission |
| US4297615A (en) * | 1979-03-19 | 1981-10-27 | The Regents Of The University Of California | High current density cathode structure |
| US4438557A (en) * | 1979-05-01 | 1984-03-27 | Woodland International Corporation | Method of using an areal array of tubular electron sources |
| US4333035A (en) * | 1979-05-01 | 1982-06-01 | Woodland International Corporation | Areal array of tubular electron sources |
| US4288717A (en) * | 1979-11-06 | 1981-09-08 | Denki Kagaku Kogyo Kabushiki Kaisha | Thermionic cathode apparatus |
| JPS58225537A (ja) * | 1982-06-25 | 1983-12-27 | Hitachi Ltd | イオン源装置 |
| JP2000011853A (ja) * | 1998-06-24 | 2000-01-14 | Advantest Corp | 電子銃、その長寿命化方法、電子機器 |
| US9455112B2 (en) | 2013-12-30 | 2016-09-27 | Mapper Lithography Ip B.V. | Cathode arrangement, electron gun, and lithography system comprising such electron gun |
| CN111819658A (zh) * | 2018-03-09 | 2020-10-23 | Atonarp株式会社 | 包括电离器的装置 |
| EP3794626A1 (en) * | 2018-03-23 | 2021-03-24 | Freemelt Ab | Cathode assembly for electron gun |
| US11094493B2 (en) * | 2019-08-01 | 2021-08-17 | Lockheed Martin Corporation | Emitter structures for enhanced thermionic emission |
| US11380511B2 (en) * | 2020-03-24 | 2022-07-05 | Fei Company | Charged particle beam source |
| CN119008352A (zh) * | 2024-10-22 | 2024-11-22 | 中国人民解放军空军工程大学 | 一种电子枪阴极的电子轰击加热装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1210678A (en) * | 1915-05-19 | 1917-01-02 | Western Electric Co | Thermionic amplifier. |
| US2159824A (en) * | 1936-12-01 | 1939-05-23 | Hans J Spanner | Discharge device |
| US2386790A (en) * | 1944-11-29 | 1945-10-16 | Sylvania Electric Prod | Electron gun and the like |
| US2585582A (en) * | 1949-07-07 | 1952-02-12 | Bell Telephone Labor Inc | Electron gun |
| US2561768A (en) * | 1950-04-10 | 1951-07-24 | Zenith Radio Corp | Thermionic cathode activation |
| US3333138A (en) * | 1965-01-11 | 1967-07-25 | Rauland Corp | Support assembly for a low-wattage cathode |
| US3369145A (en) * | 1965-04-09 | 1968-02-13 | Wagner Electric Corp | Thermionic emissive cathode |
| DE1251876B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1965-12-23 | |||
| US3440475A (en) * | 1967-04-11 | 1969-04-22 | Lokomotivbau Elektrotech | Lanthanum hexaboride cathode system for an electron beam generator |
| US3621324A (en) * | 1968-11-05 | 1971-11-16 | Westinghouse Electric Corp | High-power cathode |
| US3727093A (en) * | 1971-01-20 | 1973-04-10 | Westinghouse Electric Corp | Electron beam apparatus |
-
1972
- 1972-12-08 JP JP12250272A patent/JPS5242591B2/ja not_active Expired
-
1973
- 1973-12-10 US US423107A patent/US3928783A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3928783A (en) | 1975-12-23 |
| JPS4979768A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-08-01 |