JPS5242143Y2 - - Google Patents

Info

Publication number
JPS5242143Y2
JPS5242143Y2 JP13132772U JP13132772U JPS5242143Y2 JP S5242143 Y2 JPS5242143 Y2 JP S5242143Y2 JP 13132772 U JP13132772 U JP 13132772U JP 13132772 U JP13132772 U JP 13132772U JP S5242143 Y2 JPS5242143 Y2 JP S5242143Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13132772U
Other versions
JPS4983356U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13132772U priority Critical patent/JPS5242143Y2/ja
Publication of JPS4983356U publication Critical patent/JPS4983356U/ja
Application granted granted Critical
Publication of JPS5242143Y2 publication Critical patent/JPS5242143Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP13132772U 1972-11-15 1972-11-15 Expired JPS5242143Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13132772U JPS5242143Y2 (ja) 1972-11-15 1972-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13132772U JPS5242143Y2 (ja) 1972-11-15 1972-11-15

Publications (2)

Publication Number Publication Date
JPS4983356U JPS4983356U (ja) 1974-07-18
JPS5242143Y2 true JPS5242143Y2 (ja) 1977-09-24

Family

ID=28392485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13132772U Expired JPS5242143Y2 (ja) 1972-11-15 1972-11-15

Country Status (1)

Country Link
JP (1) JPS5242143Y2 (ja)

Also Published As

Publication number Publication date
JPS4983356U (ja) 1974-07-18

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