JPS5241099B2 - - Google Patents
Info
- Publication number
- JPS5241099B2 JPS5241099B2 JP48026715A JP2671573A JPS5241099B2 JP S5241099 B2 JPS5241099 B2 JP S5241099B2 JP 48026715 A JP48026715 A JP 48026715A JP 2671573 A JP2671573 A JP 2671573A JP S5241099 B2 JPS5241099 B2 JP S5241099B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48026715A JPS5241099B2 (enExample) | 1973-03-07 | 1973-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48026715A JPS5241099B2 (enExample) | 1973-03-07 | 1973-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49115659A JPS49115659A (enExample) | 1974-11-05 |
| JPS5241099B2 true JPS5241099B2 (enExample) | 1977-10-17 |
Family
ID=12201038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48026715A Expired JPS5241099B2 (enExample) | 1973-03-07 | 1973-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5241099B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4128670A (en) * | 1977-11-11 | 1978-12-05 | International Business Machines Corporation | Fabrication method for integrated circuits with polysilicon lines having low sheet resistance |
| JPS5568675A (en) * | 1978-11-17 | 1980-05-23 | Toshiba Corp | Fabrication of complementary mos transistor |
| JPS6310572A (ja) * | 1986-07-01 | 1988-01-18 | Nec Corp | 半導体装置の製造方法 |
-
1973
- 1973-03-07 JP JP48026715A patent/JPS5241099B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49115659A (enExample) | 1974-11-05 |