JPS5241099B2 - - Google Patents

Info

Publication number
JPS5241099B2
JPS5241099B2 JP48026715A JP2671573A JPS5241099B2 JP S5241099 B2 JPS5241099 B2 JP S5241099B2 JP 48026715 A JP48026715 A JP 48026715A JP 2671573 A JP2671573 A JP 2671573A JP S5241099 B2 JPS5241099 B2 JP S5241099B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48026715A
Other languages
Japanese (ja)
Other versions
JPS49115659A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48026715A priority Critical patent/JPS5241099B2/ja
Publication of JPS49115659A publication Critical patent/JPS49115659A/ja
Publication of JPS5241099B2 publication Critical patent/JPS5241099B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP48026715A 1973-03-07 1973-03-07 Expired JPS5241099B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48026715A JPS5241099B2 (enrdf_load_stackoverflow) 1973-03-07 1973-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48026715A JPS5241099B2 (enrdf_load_stackoverflow) 1973-03-07 1973-03-07

Publications (2)

Publication Number Publication Date
JPS49115659A JPS49115659A (enrdf_load_stackoverflow) 1974-11-05
JPS5241099B2 true JPS5241099B2 (enrdf_load_stackoverflow) 1977-10-17

Family

ID=12201038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48026715A Expired JPS5241099B2 (enrdf_load_stackoverflow) 1973-03-07 1973-03-07

Country Status (1)

Country Link
JP (1) JPS5241099B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4128670A (en) * 1977-11-11 1978-12-05 International Business Machines Corporation Fabrication method for integrated circuits with polysilicon lines having low sheet resistance
JPS5568675A (en) * 1978-11-17 1980-05-23 Toshiba Corp Fabrication of complementary mos transistor
JPS6310572A (ja) * 1986-07-01 1988-01-18 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS49115659A (enrdf_load_stackoverflow) 1974-11-05

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