JPS5241001A - Photooetching method - Google Patents
Photooetching methodInfo
- Publication number
- JPS5241001A JPS5241001A JP50116821A JP11682175A JPS5241001A JP S5241001 A JPS5241001 A JP S5241001A JP 50116821 A JP50116821 A JP 50116821A JP 11682175 A JP11682175 A JP 11682175A JP S5241001 A JPS5241001 A JP S5241001A
- Authority
- JP
- Japan
- Prior art keywords
- photooetching
- photooetching method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50116821A JPS5241001A (en) | 1975-09-27 | 1975-09-27 | Photooetching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50116821A JPS5241001A (en) | 1975-09-27 | 1975-09-27 | Photooetching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5241001A true JPS5241001A (en) | 1977-03-30 |
Family
ID=14696453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50116821A Pending JPS5241001A (en) | 1975-09-27 | 1975-09-27 | Photooetching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5241001A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173254A (en) * | 1981-04-17 | 1982-10-25 | Toshiba Corp | Electronic postal system |
-
1975
- 1975-09-27 JP JP50116821A patent/JPS5241001A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57173254A (en) * | 1981-04-17 | 1982-10-25 | Toshiba Corp | Electronic postal system |
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