JPS5241001A - Photooetching method - Google Patents

Photooetching method

Info

Publication number
JPS5241001A
JPS5241001A JP50116821A JP11682175A JPS5241001A JP S5241001 A JPS5241001 A JP S5241001A JP 50116821 A JP50116821 A JP 50116821A JP 11682175 A JP11682175 A JP 11682175A JP S5241001 A JPS5241001 A JP S5241001A
Authority
JP
Japan
Prior art keywords
photooetching
photooetching method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50116821A
Other languages
Japanese (ja)
Inventor
Hiroshi Ochi
Masayuki Iwata
Izumi Tashiro
Motomasa Fujiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibigawa Electric Industry Co Ltd
Original Assignee
Ibigawa Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibigawa Electric Industry Co Ltd filed Critical Ibigawa Electric Industry Co Ltd
Priority to JP50116821A priority Critical patent/JPS5241001A/en
Publication of JPS5241001A publication Critical patent/JPS5241001A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP50116821A 1975-09-27 1975-09-27 Photooetching method Pending JPS5241001A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50116821A JPS5241001A (en) 1975-09-27 1975-09-27 Photooetching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50116821A JPS5241001A (en) 1975-09-27 1975-09-27 Photooetching method

Publications (1)

Publication Number Publication Date
JPS5241001A true JPS5241001A (en) 1977-03-30

Family

ID=14696453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50116821A Pending JPS5241001A (en) 1975-09-27 1975-09-27 Photooetching method

Country Status (1)

Country Link
JP (1) JPS5241001A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57173254A (en) * 1981-04-17 1982-10-25 Toshiba Corp Electronic postal system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57173254A (en) * 1981-04-17 1982-10-25 Toshiba Corp Electronic postal system

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