JPS5240233B1 - - Google Patents
Info
- Publication number
- JPS5240233B1 JPS5240233B1 JP46047584A JP4758471A JPS5240233B1 JP S5240233 B1 JPS5240233 B1 JP S5240233B1 JP 46047584 A JP46047584 A JP 46047584A JP 4758471 A JP4758471 A JP 4758471A JP S5240233 B1 JPS5240233 B1 JP S5240233B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US5084470A | 1970-06-29 | 1970-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5240233B1 true JPS5240233B1 (show.php) | 1977-10-11 |
Family
ID=21967825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46047584A Pending JPS5240233B1 (show.php) | 1970-06-29 | 1971-06-29 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3636917A (show.php) |
| JP (1) | JPS5240233B1 (show.php) |
| GB (1) | GB1329876A (show.php) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3856414A (en) * | 1973-01-18 | 1974-12-24 | Paulmar Inc | Apparatus for inspecting strip material |
| US3858547A (en) * | 1973-12-14 | 1975-01-07 | Nils H Bergfelt | Coating machine having an adjustable rotation system |
| US4096821A (en) * | 1976-12-13 | 1978-06-27 | Westinghouse Electric Corp. | System for fabricating thin-film electronic components |
| US4553034A (en) * | 1983-12-02 | 1985-11-12 | Westinghouse Electric Corp. | Ion exchange resin intrusion monitor |
| US5226107A (en) * | 1992-06-22 | 1993-07-06 | General Dynamics Corporation, Space Systems Division | Apparatus and method of using fiber-optic light guide for heating enclosed test articles |
| GB0218998D0 (en) * | 2002-08-14 | 2002-09-25 | Oxford Instr Plasma Technology | Thin film deposition apparatus |
| ITTO20050780A1 (it) * | 2005-11-03 | 2007-05-04 | Geo S R L | Dispositivo e procedimento di trattamento e consolidamento di blocchi e lastre di pietra. |
| US7679063B2 (en) * | 2005-11-07 | 2010-03-16 | Cardinal Cg Company | Method and apparatus for identifying photocatalytic coatings |
| KR102002849B1 (ko) * | 2012-09-17 | 2019-07-24 | 삼성디스플레이 주식회사 | 증착 장치 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2315282A (en) * | 1939-10-21 | 1943-03-30 | Harold A Snow | Method of and apparatus for determining characteristics of surfaces |
| US2478206A (en) * | 1944-02-24 | 1949-08-09 | Westinghouse Electric Corp | Multirotor gas turbine power plant with propeller |
| US2656845A (en) * | 1948-03-06 | 1953-10-27 | Fmc Corp | Apparatus for testing and controlling the concentration of solutions |
| US2973686A (en) * | 1957-10-11 | 1961-03-07 | Gen Precision Inc | Apparatus for spectrophotometric monitoring of thin film coatings |
| GB923885A (en) * | 1958-10-30 | 1963-04-18 | Courtaulds Ltd | Nephelometers |
| US3016464A (en) * | 1959-06-10 | 1962-01-09 | Daystrom Inc | Apparatus for determining the location and thickness of a reflecting object |
| US3017512A (en) * | 1959-06-29 | 1962-01-16 | American Can Co | Coating thickness gauge |
| US3185024A (en) * | 1962-03-08 | 1965-05-25 | Donart Electronics Inc | Method and apparatus for optically measuring the thickness of thin transparent films |
| BE638309A (show.php) * | 1963-10-08 | |||
| US3549264A (en) * | 1968-11-13 | 1970-12-22 | Hunter Associates Lab Inc | Instrument for measuring the geometric attributes of metallic appearance by measuring light reflected at various angles from a surface |
-
1970
- 1970-06-29 US US50844A patent/US3636917A/en not_active Expired - Lifetime
-
1971
- 1971-06-09 GB GB1967971*[A patent/GB1329876A/en not_active Expired
- 1971-06-29 JP JP46047584A patent/JPS5240233B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1329876A (en) | 1973-09-12 |
| US3636917A (en) | 1972-01-25 |