JPS5239851U - - Google Patents
Info
- Publication number
- JPS5239851U JPS5239851U JP12541675U JP12541675U JPS5239851U JP S5239851 U JPS5239851 U JP S5239851U JP 12541675 U JP12541675 U JP 12541675U JP 12541675 U JP12541675 U JP 12541675U JP S5239851 U JPS5239851 U JP S5239851U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12541675U JPS5239851U (en, 2012) | 1975-09-11 | 1975-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12541675U JPS5239851U (en, 2012) | 1975-09-11 | 1975-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5239851U true JPS5239851U (en, 2012) | 1977-03-22 |
Family
ID=28605904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12541675U Pending JPS5239851U (en, 2012) | 1975-09-11 | 1975-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5239851U (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4838445A (en, 2012) * | 1971-09-18 | 1973-06-06 | ||
| JPS56152963A (en) * | 1980-04-30 | 1981-11-26 | Hitachi Ltd | Sputtering apparatus |
| JPH02107764A (ja) * | 1988-10-15 | 1990-04-19 | Mitsubishi Kasei Corp | マグネトロンスパッタ装置 |
-
1975
- 1975-09-11 JP JP12541675U patent/JPS5239851U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4838445A (en, 2012) * | 1971-09-18 | 1973-06-06 | ||
| JPS56152963A (en) * | 1980-04-30 | 1981-11-26 | Hitachi Ltd | Sputtering apparatus |
| JPH02107764A (ja) * | 1988-10-15 | 1990-04-19 | Mitsubishi Kasei Corp | マグネトロンスパッタ装置 |