JPS5239099Y2 - - Google Patents
Info
- Publication number
- JPS5239099Y2 JPS5239099Y2 JP6253875U JP6253875U JPS5239099Y2 JP S5239099 Y2 JPS5239099 Y2 JP S5239099Y2 JP 6253875 U JP6253875 U JP 6253875U JP 6253875 U JP6253875 U JP 6253875U JP S5239099 Y2 JPS5239099 Y2 JP S5239099Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6253875U JPS5239099Y2 (https=) | 1975-05-09 | 1975-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6253875U JPS5239099Y2 (https=) | 1975-05-09 | 1975-05-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51142062U JPS51142062U (https=) | 1976-11-16 |
| JPS5239099Y2 true JPS5239099Y2 (https=) | 1977-09-05 |
Family
ID=28525000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6253875U Expired JPS5239099Y2 (https=) | 1975-05-09 | 1975-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5239099Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5813222B2 (ja) * | 1978-06-20 | 1983-03-12 | 富士プラント工業株式会社 | 薄板状基板へ均一に被膜を形成する方法および装置 |
-
1975
- 1975-05-09 JP JP6253875U patent/JPS5239099Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51142062U (https=) | 1976-11-16 |