JPS5239099Y2 - - Google Patents

Info

Publication number
JPS5239099Y2
JPS5239099Y2 JP6253875U JP6253875U JPS5239099Y2 JP S5239099 Y2 JPS5239099 Y2 JP S5239099Y2 JP 6253875 U JP6253875 U JP 6253875U JP 6253875 U JP6253875 U JP 6253875U JP S5239099 Y2 JPS5239099 Y2 JP S5239099Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6253875U
Other languages
Japanese (ja)
Other versions
JPS51142062U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6253875U priority Critical patent/JPS5239099Y2/ja
Publication of JPS51142062U publication Critical patent/JPS51142062U/ja
Application granted granted Critical
Publication of JPS5239099Y2 publication Critical patent/JPS5239099Y2/ja
Expired legal-status Critical Current

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  • Coating Apparatus (AREA)
JP6253875U 1975-05-09 1975-05-09 Expired JPS5239099Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6253875U JPS5239099Y2 (enrdf_load_stackoverflow) 1975-05-09 1975-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6253875U JPS5239099Y2 (enrdf_load_stackoverflow) 1975-05-09 1975-05-09

Publications (2)

Publication Number Publication Date
JPS51142062U JPS51142062U (enrdf_load_stackoverflow) 1976-11-16
JPS5239099Y2 true JPS5239099Y2 (enrdf_load_stackoverflow) 1977-09-05

Family

ID=28525000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6253875U Expired JPS5239099Y2 (enrdf_load_stackoverflow) 1975-05-09 1975-05-09

Country Status (1)

Country Link
JP (1) JPS5239099Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5813222B2 (ja) * 1978-06-20 1983-03-12 富士プラント工業株式会社 薄板状基板へ均一に被膜を形成する方法および装置

Also Published As

Publication number Publication date
JPS51142062U (enrdf_load_stackoverflow) 1976-11-16

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