JPS5239069U - - Google Patents

Info

Publication number
JPS5239069U
JPS5239069U JP12516175U JP12516175U JPS5239069U JP S5239069 U JPS5239069 U JP S5239069U JP 12516175 U JP12516175 U JP 12516175U JP 12516175 U JP12516175 U JP 12516175U JP S5239069 U JPS5239069 U JP S5239069U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12516175U
Other languages
Japanese (ja)
Other versions
JPS574379Y2 (Direct
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975125161U priority Critical patent/JPS574379Y2/ja
Publication of JPS5239069U publication Critical patent/JPS5239069U/ja
Application granted granted Critical
Publication of JPS574379Y2 publication Critical patent/JPS574379Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1975125161U 1975-09-11 1975-09-11 Expired JPS574379Y2 (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975125161U JPS574379Y2 (Direct) 1975-09-11 1975-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975125161U JPS574379Y2 (Direct) 1975-09-11 1975-09-11

Publications (2)

Publication Number Publication Date
JPS5239069U true JPS5239069U (Direct) 1977-03-19
JPS574379Y2 JPS574379Y2 (Direct) 1982-01-27

Family

ID=28605652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975125161U Expired JPS574379Y2 (Direct) 1975-09-11 1975-09-11

Country Status (1)

Country Link
JP (1) JPS574379Y2 (Direct)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290620B1 (en) * 1986-11-28 1994-10-12 Nippon Telegraph And Telephone Corporation Apparatus for observation using charged particle beams and method of surface observation using charged particle beams

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984359A (Direct) * 1972-12-18 1974-08-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984359A (Direct) * 1972-12-18 1974-08-13

Also Published As

Publication number Publication date
JPS574379Y2 (Direct) 1982-01-27

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