JPS5238905U - - Google Patents

Info

Publication number
JPS5238905U
JPS5238905U JP12493775U JP12493775U JPS5238905U JP S5238905 U JPS5238905 U JP S5238905U JP 12493775 U JP12493775 U JP 12493775U JP 12493775 U JP12493775 U JP 12493775U JP S5238905 U JPS5238905 U JP S5238905U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12493775U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12493775U priority Critical patent/JPS5238905U/ja
Publication of JPS5238905U publication Critical patent/JPS5238905U/ja
Pending legal-status Critical Current

Links

JP12493775U 1975-09-12 1975-09-12 Pending JPS5238905U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12493775U JPS5238905U (de) 1975-09-12 1975-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12493775U JPS5238905U (de) 1975-09-12 1975-09-12

Publications (1)

Publication Number Publication Date
JPS5238905U true JPS5238905U (de) 1977-03-18

Family

ID=28605434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12493775U Pending JPS5238905U (de) 1975-09-12 1975-09-12

Country Status (1)

Country Link
JP (1) JPS5238905U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186946A (ja) * 1982-04-26 1983-11-01 Ando Electric Co Ltd ウエハの位置決め装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928910B1 (de) * 1970-06-19 1974-07-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928910B1 (de) * 1970-06-19 1974-07-30

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186946A (ja) * 1982-04-26 1983-11-01 Ando Electric Co Ltd ウエハの位置決め装置
JPS6211503B2 (de) * 1982-04-26 1987-03-12 Ando Electric

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