JPS5238905U - - Google Patents
Info
- Publication number
- JPS5238905U JPS5238905U JP12493775U JP12493775U JPS5238905U JP S5238905 U JPS5238905 U JP S5238905U JP 12493775 U JP12493775 U JP 12493775U JP 12493775 U JP12493775 U JP 12493775U JP S5238905 U JPS5238905 U JP S5238905U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12493775U JPS5238905U (de) | 1975-09-12 | 1975-09-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12493775U JPS5238905U (de) | 1975-09-12 | 1975-09-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5238905U true JPS5238905U (de) | 1977-03-18 |
Family
ID=28605434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12493775U Pending JPS5238905U (de) | 1975-09-12 | 1975-09-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5238905U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58186946A (ja) * | 1982-04-26 | 1983-11-01 | Ando Electric Co Ltd | ウエハの位置決め装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4928910B1 (de) * | 1970-06-19 | 1974-07-30 |
-
1975
- 1975-09-12 JP JP12493775U patent/JPS5238905U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4928910B1 (de) * | 1970-06-19 | 1974-07-30 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58186946A (ja) * | 1982-04-26 | 1983-11-01 | Ando Electric Co Ltd | ウエハの位置決め装置 |
JPS6211503B2 (de) * | 1982-04-26 | 1987-03-12 | Ando Electric |