JPS5238645A - Opening and closing valve of vacuum sorption device - Google Patents

Opening and closing valve of vacuum sorption device

Info

Publication number
JPS5238645A
JPS5238645A JP11368875A JP11368875A JPS5238645A JP S5238645 A JPS5238645 A JP S5238645A JP 11368875 A JP11368875 A JP 11368875A JP 11368875 A JP11368875 A JP 11368875A JP S5238645 A JPS5238645 A JP S5238645A
Authority
JP
Japan
Prior art keywords
opening
closing valve
sorption device
vacuum sorption
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11368875A
Other languages
Japanese (ja)
Inventor
Hirotake Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11368875A priority Critical patent/JPS5238645A/en
Publication of JPS5238645A publication Critical patent/JPS5238645A/en
Pending legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
JP11368875A 1975-09-22 1975-09-22 Opening and closing valve of vacuum sorption device Pending JPS5238645A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11368875A JPS5238645A (en) 1975-09-22 1975-09-22 Opening and closing valve of vacuum sorption device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11368875A JPS5238645A (en) 1975-09-22 1975-09-22 Opening and closing valve of vacuum sorption device

Publications (1)

Publication Number Publication Date
JPS5238645A true JPS5238645A (en) 1977-03-25

Family

ID=14618651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11368875A Pending JPS5238645A (en) 1975-09-22 1975-09-22 Opening and closing valve of vacuum sorption device

Country Status (1)

Country Link
JP (1) JPS5238645A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07145872A (en) * 1993-11-24 1995-06-06 Nec Corp Evacuating valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07145872A (en) * 1993-11-24 1995-06-06 Nec Corp Evacuating valve

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