JPS5238516B2 - - Google Patents
Info
- Publication number
- JPS5238516B2 JPS5238516B2 JP7887272A JP7887272A JPS5238516B2 JP S5238516 B2 JPS5238516 B2 JP S5238516B2 JP 7887272 A JP7887272 A JP 7887272A JP 7887272 A JP7887272 A JP 7887272A JP S5238516 B2 JPS5238516 B2 JP S5238516B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7887272A JPS5238516B2 (enEXAMPLES) | 1972-08-07 | 1972-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7887272A JPS5238516B2 (enEXAMPLES) | 1972-08-07 | 1972-08-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4935280A JPS4935280A (enEXAMPLES) | 1974-04-01 |
| JPS5238516B2 true JPS5238516B2 (enEXAMPLES) | 1977-09-29 |
Family
ID=13673902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7887272A Expired JPS5238516B2 (enEXAMPLES) | 1972-08-07 | 1972-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5238516B2 (enEXAMPLES) |
-
1972
- 1972-08-07 JP JP7887272A patent/JPS5238516B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4935280A (enEXAMPLES) | 1974-04-01 |