JPS5237949B2 - - Google Patents

Info

Publication number
JPS5237949B2
JPS5237949B2 JP12528872A JP12528872A JPS5237949B2 JP S5237949 B2 JPS5237949 B2 JP S5237949B2 JP 12528872 A JP12528872 A JP 12528872A JP 12528872 A JP12528872 A JP 12528872A JP S5237949 B2 JPS5237949 B2 JP S5237949B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12528872A
Other languages
Japanese (ja)
Other versions
JPS4984189A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12528872A priority Critical patent/JPS5237949B2/ja
Publication of JPS4984189A publication Critical patent/JPS4984189A/ja
Publication of JPS5237949B2 publication Critical patent/JPS5237949B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
JP12528872A 1972-12-15 1972-12-15 Expired JPS5237949B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12528872A JPS5237949B2 (enExample) 1972-12-15 1972-12-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12528872A JPS5237949B2 (enExample) 1972-12-15 1972-12-15

Publications (2)

Publication Number Publication Date
JPS4984189A JPS4984189A (enExample) 1974-08-13
JPS5237949B2 true JPS5237949B2 (enExample) 1977-09-26

Family

ID=14906353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12528872A Expired JPS5237949B2 (enExample) 1972-12-15 1972-12-15

Country Status (1)

Country Link
JP (1) JPS5237949B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548956U (enExample) * 1977-06-21 1979-01-20

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577178A (en) * 1978-12-06 1980-06-10 Toshiba Corp Semiconductor pressure converting element
JPS5664471A (en) * 1979-10-30 1981-06-01 Toshiba Corp Detector for pressure of semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548956U (enExample) * 1977-06-21 1979-01-20

Also Published As

Publication number Publication date
JPS4984189A (enExample) 1974-08-13

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