JPS5237949B2 - - Google Patents

Info

Publication number
JPS5237949B2
JPS5237949B2 JP12528872A JP12528872A JPS5237949B2 JP S5237949 B2 JPS5237949 B2 JP S5237949B2 JP 12528872 A JP12528872 A JP 12528872A JP 12528872 A JP12528872 A JP 12528872A JP S5237949 B2 JPS5237949 B2 JP S5237949B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12528872A
Other languages
Japanese (ja)
Other versions
JPS4984189A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12528872A priority Critical patent/JPS5237949B2/ja
Publication of JPS4984189A publication Critical patent/JPS4984189A/ja
Publication of JPS5237949B2 publication Critical patent/JPS5237949B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
JP12528872A 1972-12-15 1972-12-15 Expired JPS5237949B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12528872A JPS5237949B2 (en:Method) 1972-12-15 1972-12-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12528872A JPS5237949B2 (en:Method) 1972-12-15 1972-12-15

Publications (2)

Publication Number Publication Date
JPS4984189A JPS4984189A (en:Method) 1974-08-13
JPS5237949B2 true JPS5237949B2 (en:Method) 1977-09-26

Family

ID=14906353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12528872A Expired JPS5237949B2 (en:Method) 1972-12-15 1972-12-15

Country Status (1)

Country Link
JP (1) JPS5237949B2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548956U (en:Method) * 1977-06-21 1979-01-20

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577178A (en) * 1978-12-06 1980-06-10 Toshiba Corp Semiconductor pressure converting element
JPS5664471A (en) * 1979-10-30 1981-06-01 Toshiba Corp Detector for pressure of semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548956U (en:Method) * 1977-06-21 1979-01-20

Also Published As

Publication number Publication date
JPS4984189A (en:Method) 1974-08-13

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