JPS5237577A - Apparatus for forming coating by ion spattering process - Google Patents
Apparatus for forming coating by ion spattering processInfo
- Publication number
- JPS5237577A JPS5237577A JP50112503A JP11250375A JPS5237577A JP S5237577 A JPS5237577 A JP S5237577A JP 50112503 A JP50112503 A JP 50112503A JP 11250375 A JP11250375 A JP 11250375A JP S5237577 A JPS5237577 A JP S5237577A
- Authority
- JP
- Japan
- Prior art keywords
- forming coating
- spattering process
- ion spattering
- ion
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50112503A JPS5237577A (en) | 1975-09-17 | 1975-09-17 | Apparatus for forming coating by ion spattering process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50112503A JPS5237577A (en) | 1975-09-17 | 1975-09-17 | Apparatus for forming coating by ion spattering process |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5237577A true JPS5237577A (en) | 1977-03-23 |
JPS5432637B2 JPS5432637B2 (pt) | 1979-10-16 |
Family
ID=14588271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50112503A Granted JPS5237577A (en) | 1975-09-17 | 1975-09-17 | Apparatus for forming coating by ion spattering process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5237577A (pt) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5622616A (en) * | 1979-08-03 | 1981-03-03 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of diamondlike carbon film |
JPS62147265U (pt) * | 1986-03-12 | 1987-09-17 |
-
1975
- 1975-09-17 JP JP50112503A patent/JPS5237577A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5622616A (en) * | 1979-08-03 | 1981-03-03 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of diamondlike carbon film |
JPS5825041B2 (ja) * | 1979-08-03 | 1983-05-25 | 日本電信電話株式会社 | ダイヤモンド状炭素膜の製造方法 |
JPS62147265U (pt) * | 1986-03-12 | 1987-09-17 | ||
JPH0527804Y2 (pt) * | 1986-03-12 | 1993-07-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS5432637B2 (pt) | 1979-10-16 |
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