JPS5237577A - Apparatus for forming coating by ion spattering process - Google Patents

Apparatus for forming coating by ion spattering process

Info

Publication number
JPS5237577A
JPS5237577A JP50112503A JP11250375A JPS5237577A JP S5237577 A JPS5237577 A JP S5237577A JP 50112503 A JP50112503 A JP 50112503A JP 11250375 A JP11250375 A JP 11250375A JP S5237577 A JPS5237577 A JP S5237577A
Authority
JP
Japan
Prior art keywords
forming coating
spattering process
ion spattering
ion
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50112503A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5432637B2 (enExample
Inventor
Mihairobuichi G Biyachiesurafu
Buratonobuichi Demidofu Areku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP50112503A priority Critical patent/JPS5237577A/ja
Publication of JPS5237577A publication Critical patent/JPS5237577A/ja
Publication of JPS5432637B2 publication Critical patent/JPS5432637B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
JP50112503A 1975-09-17 1975-09-17 Apparatus for forming coating by ion spattering process Granted JPS5237577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50112503A JPS5237577A (en) 1975-09-17 1975-09-17 Apparatus for forming coating by ion spattering process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50112503A JPS5237577A (en) 1975-09-17 1975-09-17 Apparatus for forming coating by ion spattering process

Publications (2)

Publication Number Publication Date
JPS5237577A true JPS5237577A (en) 1977-03-23
JPS5432637B2 JPS5432637B2 (enExample) 1979-10-16

Family

ID=14588271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50112503A Granted JPS5237577A (en) 1975-09-17 1975-09-17 Apparatus for forming coating by ion spattering process

Country Status (1)

Country Link
JP (1) JPS5237577A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5622616A (en) * 1979-08-03 1981-03-03 Nippon Telegr & Teleph Corp <Ntt> Manufacture of diamondlike carbon film
JPS62147265U (enExample) * 1986-03-12 1987-09-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5622616A (en) * 1979-08-03 1981-03-03 Nippon Telegr & Teleph Corp <Ntt> Manufacture of diamondlike carbon film
JPS62147265U (enExample) * 1986-03-12 1987-09-17

Also Published As

Publication number Publication date
JPS5432637B2 (enExample) 1979-10-16

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