JPS5237065A - Angle masuring apparatus of digital type - Google Patents

Angle masuring apparatus of digital type

Info

Publication number
JPS5237065A
JPS5237065A JP11253775A JP11253775A JPS5237065A JP S5237065 A JPS5237065 A JP S5237065A JP 11253775 A JP11253775 A JP 11253775A JP 11253775 A JP11253775 A JP 11253775A JP S5237065 A JPS5237065 A JP S5237065A
Authority
JP
Japan
Prior art keywords
angle
masuring
digital type
digital
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11253775A
Other languages
Japanese (ja)
Other versions
JPS5624885B2 (en
Inventor
Kiyohiko Nakazawa
Masamichi Tsuchikane
Toshifumi Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP11253775A priority Critical patent/JPS5237065A/en
Publication of JPS5237065A publication Critical patent/JPS5237065A/en
Publication of JPS5624885B2 publication Critical patent/JPS5624885B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: Digital type angle measuring apparatus, measuring minute rotation angle with oscillator precisely.
COPYRIGHT: (C)1977,JPO&Japio
JP11253775A 1975-09-19 1975-09-19 Angle masuring apparatus of digital type Granted JPS5237065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11253775A JPS5237065A (en) 1975-09-19 1975-09-19 Angle masuring apparatus of digital type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11253775A JPS5237065A (en) 1975-09-19 1975-09-19 Angle masuring apparatus of digital type

Publications (2)

Publication Number Publication Date
JPS5237065A true JPS5237065A (en) 1977-03-22
JPS5624885B2 JPS5624885B2 (en) 1981-06-09

Family

ID=14589114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11253775A Granted JPS5237065A (en) 1975-09-19 1975-09-19 Angle masuring apparatus of digital type

Country Status (1)

Country Link
JP (1) JPS5237065A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105526868A (en) * 2014-10-16 2016-04-27 株式会社拓普康 Displacement measuring method and displacement measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105526868A (en) * 2014-10-16 2016-04-27 株式会社拓普康 Displacement measuring method and displacement measuring device
JP2016080504A (en) * 2014-10-16 2016-05-16 株式会社トプコン Displacement measurement method and displacement measurement device

Also Published As

Publication number Publication date
JPS5624885B2 (en) 1981-06-09

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