JPS5236986U - - Google Patents

Info

Publication number
JPS5236986U
JPS5236986U JP12401975U JP12401975U JPS5236986U JP S5236986 U JPS5236986 U JP S5236986U JP 12401975 U JP12401975 U JP 12401975U JP 12401975 U JP12401975 U JP 12401975U JP S5236986 U JPS5236986 U JP S5236986U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12401975U
Other languages
Japanese (ja)
Other versions
JPS5435114Y2 (US07413550-20080819-C00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12401975U priority Critical patent/JPS5435114Y2/ja
Publication of JPS5236986U publication Critical patent/JPS5236986U/ja
Application granted granted Critical
Publication of JPS5435114Y2 publication Critical patent/JPS5435114Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP12401975U 1975-09-09 1975-09-09 Expired JPS5435114Y2 (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12401975U JPS5435114Y2 (US07413550-20080819-C00001.png) 1975-09-09 1975-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12401975U JPS5435114Y2 (US07413550-20080819-C00001.png) 1975-09-09 1975-09-09

Publications (2)

Publication Number Publication Date
JPS5236986U true JPS5236986U (US07413550-20080819-C00001.png) 1977-03-16
JPS5435114Y2 JPS5435114Y2 (US07413550-20080819-C00001.png) 1979-10-25

Family

ID=28604557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12401975U Expired JPS5435114Y2 (US07413550-20080819-C00001.png) 1975-09-09 1975-09-09

Country Status (1)

Country Link
JP (1) JPS5435114Y2 (US07413550-20080819-C00001.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62169328A (ja) * 1986-01-21 1987-07-25 Toshiba Mach Co Ltd 基板交換装置
JPS62169327A (ja) * 1986-01-21 1987-07-25 Toshiba Mach Co Ltd 基板交換装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62169328A (ja) * 1986-01-21 1987-07-25 Toshiba Mach Co Ltd 基板交換装置
JPS62169327A (ja) * 1986-01-21 1987-07-25 Toshiba Mach Co Ltd 基板交換装置

Also Published As

Publication number Publication date
JPS5435114Y2 (US07413550-20080819-C00001.png) 1979-10-25

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