JPS5236490B2 - - Google Patents

Info

Publication number
JPS5236490B2
JPS5236490B2 JP11799572A JP11799572A JPS5236490B2 JP S5236490 B2 JPS5236490 B2 JP S5236490B2 JP 11799572 A JP11799572 A JP 11799572A JP 11799572 A JP11799572 A JP 11799572A JP S5236490 B2 JPS5236490 B2 JP S5236490B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11799572A
Other languages
Japanese (ja)
Other versions
JPS4976721A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11799572A priority Critical patent/JPS5236490B2/ja
Publication of JPS4976721A publication Critical patent/JPS4976721A/ja
Publication of JPS5236490B2 publication Critical patent/JPS5236490B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11799572A 1972-11-27 1972-11-27 Expired JPS5236490B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11799572A JPS5236490B2 (enrdf_load_stackoverflow) 1972-11-27 1972-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11799572A JPS5236490B2 (enrdf_load_stackoverflow) 1972-11-27 1972-11-27

Publications (2)

Publication Number Publication Date
JPS4976721A JPS4976721A (enrdf_load_stackoverflow) 1974-07-24
JPS5236490B2 true JPS5236490B2 (enrdf_load_stackoverflow) 1977-09-16

Family

ID=14725414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11799572A Expired JPS5236490B2 (enrdf_load_stackoverflow) 1972-11-27 1972-11-27

Country Status (1)

Country Link
JP (1) JPS5236490B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2652218A1 (de) * 1976-11-16 1978-05-24 Wacker Chemitronic Verfahren zur herstellung von substratgebundenem, grossflaechigem silicium
FR2572312B1 (fr) * 1984-10-30 1989-01-20 Rhone Poulenc Spec Chim Procede de fabrication de barreaux de silicium ultra-pur

Also Published As

Publication number Publication date
JPS4976721A (enrdf_load_stackoverflow) 1974-07-24

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