JPS5236490B2 - - Google Patents
Info
- Publication number
- JPS5236490B2 JPS5236490B2 JP11799572A JP11799572A JPS5236490B2 JP S5236490 B2 JPS5236490 B2 JP S5236490B2 JP 11799572 A JP11799572 A JP 11799572A JP 11799572 A JP11799572 A JP 11799572A JP S5236490 B2 JPS5236490 B2 JP S5236490B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11799572A JPS5236490B2 (cs) | 1972-11-27 | 1972-11-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11799572A JPS5236490B2 (cs) | 1972-11-27 | 1972-11-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4976721A JPS4976721A (cs) | 1974-07-24 |
JPS5236490B2 true JPS5236490B2 (cs) | 1977-09-16 |
Family
ID=14725414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11799572A Expired JPS5236490B2 (cs) | 1972-11-27 | 1972-11-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5236490B2 (cs) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2652218A1 (de) * | 1976-11-16 | 1978-05-24 | Wacker Chemitronic | Verfahren zur herstellung von substratgebundenem, grossflaechigem silicium |
FR2572312B1 (fr) * | 1984-10-30 | 1989-01-20 | Rhone Poulenc Spec Chim | Procede de fabrication de barreaux de silicium ultra-pur |
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1972
- 1972-11-27 JP JP11799572A patent/JPS5236490B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4976721A (cs) | 1974-07-24 |