JPS5236317Y2 - - Google Patents

Info

Publication number
JPS5236317Y2
JPS5236317Y2 JP12932174U JP12932174U JPS5236317Y2 JP S5236317 Y2 JPS5236317 Y2 JP S5236317Y2 JP 12932174 U JP12932174 U JP 12932174U JP 12932174 U JP12932174 U JP 12932174U JP S5236317 Y2 JPS5236317 Y2 JP S5236317Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12932174U
Other languages
Japanese (ja)
Other versions
JPS5199895U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12932174U priority Critical patent/JPS5236317Y2/ja
Priority to GB4345975A priority patent/GB1483966A/en
Priority to US05/625,041 priority patent/US4152478A/en
Priority to DE2547552A priority patent/DE2547552B2/en
Publication of JPS5199895U publication Critical patent/JPS5199895U/ja
Application granted granted Critical
Publication of JPS5236317Y2 publication Critical patent/JPS5236317Y2/ja
Priority to US06/011,917 priority patent/US4217855A/en
Expired legal-status Critical Current

Links

JP12932174U 1974-10-23 1974-10-23 Expired JPS5236317Y2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP12932174U JPS5236317Y2 (en) 1974-10-23 1974-10-23
GB4345975A GB1483966A (en) 1974-10-23 1975-10-22 Vapourized-metal cluster ion source and ionized-cluster beam deposition
US05/625,041 US4152478A (en) 1974-10-23 1975-10-23 Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate
DE2547552A DE2547552B2 (en) 1974-10-23 1975-10-23 Layer vapor deposition process and equipment
US06/011,917 US4217855A (en) 1974-10-23 1979-02-13 Vaporized-metal cluster ion source and ionized-cluster beam deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12932174U JPS5236317Y2 (en) 1974-10-23 1974-10-23

Publications (2)

Publication Number Publication Date
JPS5199895U JPS5199895U (en) 1976-08-11
JPS5236317Y2 true JPS5236317Y2 (en) 1977-08-18

Family

ID=28386809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12932174U Expired JPS5236317Y2 (en) 1974-10-23 1974-10-23

Country Status (1)

Country Link
JP (1) JPS5236317Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585985B2 (en) * 1977-09-12 1983-02-02 光音電気株式会社 Ionization method

Also Published As

Publication number Publication date
JPS5199895U (en) 1976-08-11

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