JPS5236317Y2 - - Google Patents
Info
- Publication number
- JPS5236317Y2 JPS5236317Y2 JP12932174U JP12932174U JPS5236317Y2 JP S5236317 Y2 JPS5236317 Y2 JP S5236317Y2 JP 12932174 U JP12932174 U JP 12932174U JP 12932174 U JP12932174 U JP 12932174U JP S5236317 Y2 JPS5236317 Y2 JP S5236317Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12932174U JPS5236317Y2 (en) | 1974-10-23 | 1974-10-23 | |
GB4345975A GB1483966A (en) | 1974-10-23 | 1975-10-22 | Vapourized-metal cluster ion source and ionized-cluster beam deposition |
US05/625,041 US4152478A (en) | 1974-10-23 | 1975-10-23 | Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate |
DE2547552A DE2547552B2 (en) | 1974-10-23 | 1975-10-23 | Layer vapor deposition process and equipment |
US06/011,917 US4217855A (en) | 1974-10-23 | 1979-02-13 | Vaporized-metal cluster ion source and ionized-cluster beam deposition device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12932174U JPS5236317Y2 (en) | 1974-10-23 | 1974-10-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5199895U JPS5199895U (en) | 1976-08-11 |
JPS5236317Y2 true JPS5236317Y2 (en) | 1977-08-18 |
Family
ID=28386809
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12932174U Expired JPS5236317Y2 (en) | 1974-10-23 | 1974-10-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5236317Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585985B2 (en) * | 1977-09-12 | 1983-02-02 | 光音電気株式会社 | Ionization method |
-
1974
- 1974-10-23 JP JP12932174U patent/JPS5236317Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5199895U (en) | 1976-08-11 |