JPS523618B2 - - Google Patents

Info

Publication number
JPS523618B2
JPS523618B2 JP47101789A JP10178972A JPS523618B2 JP S523618 B2 JPS523618 B2 JP S523618B2 JP 47101789 A JP47101789 A JP 47101789A JP 10178972 A JP10178972 A JP 10178972A JP S523618 B2 JPS523618 B2 JP S523618B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47101789A
Other languages
Japanese (ja)
Other versions
JPS4959085A (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47101789A priority Critical patent/JPS523618B2/ja
Priority to US405536A priority patent/US3900612A/en
Publication of JPS4959085A publication Critical patent/JPS4959085A/ja
Publication of JPS523618B2 publication Critical patent/JPS523618B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/49861—Sizing mating parts during final positional association

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Fuel-Injection Apparatus (AREA)
JP47101789A 1972-10-11 1972-10-11 Expired JPS523618B2 (da)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47101789A JPS523618B2 (da) 1972-10-11 1972-10-11
US405536A US3900612A (en) 1972-10-11 1973-10-11 Method for chemical vapor deposition of fitted surfaces in coupled article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47101789A JPS523618B2 (da) 1972-10-11 1972-10-11

Publications (2)

Publication Number Publication Date
JPS4959085A JPS4959085A (da) 1974-06-07
JPS523618B2 true JPS523618B2 (da) 1977-01-28

Family

ID=14309924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47101789A Expired JPS523618B2 (da) 1972-10-11 1972-10-11

Country Status (2)

Country Link
US (1) US3900612A (da)
JP (1) JPS523618B2 (da)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1182433B (it) * 1985-02-12 1987-10-05 Gevipi Ag Organi di tenuta in materiale duro aventi basso coefficiente di attrito
US4935313A (en) * 1985-02-12 1990-06-19 Masco Corporation Of Indiana Process of manufacturing seal members having a low friction coefficient

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2130879A (en) * 1936-04-08 1938-09-20 Gen Electric Method of making a vacuum-tight joint between solid bodies
US2880118A (en) * 1956-04-19 1959-03-31 James E Taylor Vibratory coating method and apparatus
US3637320A (en) * 1968-12-31 1972-01-25 Texas Instruments Inc Coating for assembly of parts

Also Published As

Publication number Publication date
US3900612A (en) 1975-08-19
JPS4959085A (da) 1974-06-07

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