JPS5235874B2 - - Google Patents
Info
- Publication number
- JPS5235874B2 JPS5235874B2 JP6359172A JP6359172A JPS5235874B2 JP S5235874 B2 JPS5235874 B2 JP S5235874B2 JP 6359172 A JP6359172 A JP 6359172A JP 6359172 A JP6359172 A JP 6359172A JP S5235874 B2 JPS5235874 B2 JP S5235874B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6359172A JPS5235874B2 (en) | 1972-06-24 | 1972-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6359172A JPS5235874B2 (en) | 1972-06-24 | 1972-06-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4922580A JPS4922580A (en) | 1974-02-28 |
| JPS5235874B2 true JPS5235874B2 (en) | 1977-09-12 |
Family
ID=13233650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6359172A Expired JPS5235874B2 (en) | 1972-06-24 | 1972-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5235874B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53142048A (en) * | 1977-05-17 | 1978-12-11 | Takenaka Komuten Co Ltd | Slime cleaner |
| JPS53142047A (en) * | 1977-05-17 | 1978-12-11 | Takenaka Komuten Co Ltd | Slime cleaner |
| JPS58112487U (en) * | 1982-01-21 | 1983-08-01 | 金澤 明範 | Water supply and drainage pipe cleaning tools |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0744023B2 (en) * | 1986-06-03 | 1995-05-15 | 東京エレクトロン株式会社 | Ion implanter |
| JP6076834B2 (en) | 2013-05-28 | 2017-02-08 | 住友重機械イオンテクノロジー株式会社 | High energy ion implanter |
-
1972
- 1972-06-24 JP JP6359172A patent/JPS5235874B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53142048A (en) * | 1977-05-17 | 1978-12-11 | Takenaka Komuten Co Ltd | Slime cleaner |
| JPS53142047A (en) * | 1977-05-17 | 1978-12-11 | Takenaka Komuten Co Ltd | Slime cleaner |
| JPS58112487U (en) * | 1982-01-21 | 1983-08-01 | 金澤 明範 | Water supply and drainage pipe cleaning tools |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4922580A (en) | 1974-02-28 |