JPS5235010B2 - - Google Patents
Info
- Publication number
- JPS5235010B2 JPS5235010B2 JP9160872A JP9160872A JPS5235010B2 JP S5235010 B2 JPS5235010 B2 JP S5235010B2 JP 9160872 A JP9160872 A JP 9160872A JP 9160872 A JP9160872 A JP 9160872A JP S5235010 B2 JPS5235010 B2 JP S5235010B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9160872A JPS5235010B2 (enExample) | 1972-09-12 | 1972-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9160872A JPS5235010B2 (enExample) | 1972-09-12 | 1972-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4946509A JPS4946509A (enExample) | 1974-05-04 |
| JPS5235010B2 true JPS5235010B2 (enExample) | 1977-09-07 |
Family
ID=14031271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9160872A Expired JPS5235010B2 (enExample) | 1972-09-12 | 1972-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5235010B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61118649U (enExample) * | 1985-01-09 | 1986-07-26 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5942749B2 (ja) * | 1979-07-11 | 1984-10-17 | 株式会社東芝 | 多層膜のエツチング方法 |
-
1972
- 1972-09-12 JP JP9160872A patent/JPS5235010B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61118649U (enExample) * | 1985-01-09 | 1986-07-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4946509A (enExample) | 1974-05-04 |