JPS5235010B2 - - Google Patents

Info

Publication number
JPS5235010B2
JPS5235010B2 JP9160872A JP9160872A JPS5235010B2 JP S5235010 B2 JPS5235010 B2 JP S5235010B2 JP 9160872 A JP9160872 A JP 9160872A JP 9160872 A JP9160872 A JP 9160872A JP S5235010 B2 JPS5235010 B2 JP S5235010B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9160872A
Other languages
Japanese (ja)
Other versions
JPS4946509A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9160872A priority Critical patent/JPS5235010B2/ja
Publication of JPS4946509A publication Critical patent/JPS4946509A/ja
Publication of JPS5235010B2 publication Critical patent/JPS5235010B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
JP9160872A 1972-09-12 1972-09-12 Expired JPS5235010B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9160872A JPS5235010B2 (enrdf_load_stackoverflow) 1972-09-12 1972-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9160872A JPS5235010B2 (enrdf_load_stackoverflow) 1972-09-12 1972-09-12

Publications (2)

Publication Number Publication Date
JPS4946509A JPS4946509A (enrdf_load_stackoverflow) 1974-05-04
JPS5235010B2 true JPS5235010B2 (enrdf_load_stackoverflow) 1977-09-07

Family

ID=14031271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9160872A Expired JPS5235010B2 (enrdf_load_stackoverflow) 1972-09-12 1972-09-12

Country Status (1)

Country Link
JP (1) JPS5235010B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61118649U (enrdf_load_stackoverflow) * 1985-01-09 1986-07-26

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942749B2 (ja) * 1979-07-11 1984-10-17 株式会社東芝 多層膜のエツチング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61118649U (enrdf_load_stackoverflow) * 1985-01-09 1986-07-26

Also Published As

Publication number Publication date
JPS4946509A (enrdf_load_stackoverflow) 1974-05-04

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