JPS5233478A - Gaseous epitaxial growth process - Google Patents
Gaseous epitaxial growth processInfo
- Publication number
- JPS5233478A JPS5233478A JP50110197A JP11019775A JPS5233478A JP S5233478 A JPS5233478 A JP S5233478A JP 50110197 A JP50110197 A JP 50110197A JP 11019775 A JP11019775 A JP 11019775A JP S5233478 A JPS5233478 A JP S5233478A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- growth process
- gaseous
- gaseous epitaxial
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50110197A JPS5233478A (en) | 1975-09-10 | 1975-09-10 | Gaseous epitaxial growth process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50110197A JPS5233478A (en) | 1975-09-10 | 1975-09-10 | Gaseous epitaxial growth process |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5233478A true JPS5233478A (en) | 1977-03-14 |
Family
ID=14529498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50110197A Pending JPS5233478A (en) | 1975-09-10 | 1975-09-10 | Gaseous epitaxial growth process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5233478A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110183U (en) * | 1978-01-20 | 1979-08-02 | ||
JPS61151093A (en) * | 1984-12-25 | 1986-07-09 | Nec Corp | Vapor-phase epitaxial growth of semiconductor of group iii-v compound |
JPS627477A (en) * | 1985-07-04 | 1987-01-14 | Toyoda Gosei Co Ltd | Method for forming pattern to rubber molded product |
-
1975
- 1975-09-10 JP JP50110197A patent/JPS5233478A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110183U (en) * | 1978-01-20 | 1979-08-02 | ||
JPS61151093A (en) * | 1984-12-25 | 1986-07-09 | Nec Corp | Vapor-phase epitaxial growth of semiconductor of group iii-v compound |
JPS627477A (en) * | 1985-07-04 | 1987-01-14 | Toyoda Gosei Co Ltd | Method for forming pattern to rubber molded product |
JPH034266B2 (en) * | 1985-07-04 | 1991-01-22 | Toyoda Gosei Kk |
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