JPS5232706U - - Google Patents

Info

Publication number
JPS5232706U
JPS5232706U JP11948075U JP11948075U JPS5232706U JP S5232706 U JPS5232706 U JP S5232706U JP 11948075 U JP11948075 U JP 11948075U JP 11948075 U JP11948075 U JP 11948075U JP S5232706 U JPS5232706 U JP S5232706U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11948075U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11948075U priority Critical patent/JPS5232706U/ja
Publication of JPS5232706U publication Critical patent/JPS5232706U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • Diaphragms And Bellows (AREA)
JP11948075U 1975-08-30 1975-08-30 Pending JPS5232706U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11948075U JPS5232706U (zh) 1975-08-30 1975-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11948075U JPS5232706U (zh) 1975-08-30 1975-08-30

Publications (1)

Publication Number Publication Date
JPS5232706U true JPS5232706U (zh) 1977-03-08

Family

ID=28600286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11948075U Pending JPS5232706U (zh) 1975-08-30 1975-08-30

Country Status (1)

Country Link
JP (1) JPS5232706U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04295189A (ja) * 1991-03-26 1992-10-20 Aisin Seiki Co Ltd ベローズ式流体圧送装置
JP2013050187A (ja) * 2011-08-31 2013-03-14 Dainippon Screen Mfg Co Ltd ベローズ及びそれを用いた基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04295189A (ja) * 1991-03-26 1992-10-20 Aisin Seiki Co Ltd ベローズ式流体圧送装置
JP2013050187A (ja) * 2011-08-31 2013-03-14 Dainippon Screen Mfg Co Ltd ベローズ及びそれを用いた基板処理装置

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