JPS5231655A - Measuring device of photo-resist film thickness - Google Patents
Measuring device of photo-resist film thicknessInfo
- Publication number
- JPS5231655A JPS5231655A JP10693275A JP10693275A JPS5231655A JP S5231655 A JPS5231655 A JP S5231655A JP 10693275 A JP10693275 A JP 10693275A JP 10693275 A JP10693275 A JP 10693275A JP S5231655 A JPS5231655 A JP S5231655A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- film thickness
- resist film
- measuring device
- ultraviolet ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
PURPOSE: Automatic measurement of photo-resist film thickness distribution on braun tube by detecting ultraviolet ray absorption factor.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10693275A JPS5922339B2 (en) | 1975-09-05 | 1975-09-05 | Photoresist film thickness measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10693275A JPS5922339B2 (en) | 1975-09-05 | 1975-09-05 | Photoresist film thickness measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5231655A true JPS5231655A (en) | 1977-03-10 |
JPS5922339B2 JPS5922339B2 (en) | 1984-05-25 |
Family
ID=14446163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10693275A Expired JPS5922339B2 (en) | 1975-09-05 | 1975-09-05 | Photoresist film thickness measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5922339B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62114228U (en) * | 1986-01-09 | 1987-07-21 |
-
1975
- 1975-09-05 JP JP10693275A patent/JPS5922339B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5922339B2 (en) | 1984-05-25 |
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