JPS5231655A - Measuring device of photo-resist film thickness - Google Patents

Measuring device of photo-resist film thickness

Info

Publication number
JPS5231655A
JPS5231655A JP10693275A JP10693275A JPS5231655A JP S5231655 A JPS5231655 A JP S5231655A JP 10693275 A JP10693275 A JP 10693275A JP 10693275 A JP10693275 A JP 10693275A JP S5231655 A JPS5231655 A JP S5231655A
Authority
JP
Japan
Prior art keywords
photo
film thickness
resist film
measuring device
ultraviolet ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10693275A
Other languages
Japanese (ja)
Other versions
JPS5922339B2 (en
Inventor
Chiaki Shinpo
Katsumi Takami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10693275A priority Critical patent/JPS5922339B2/en
Publication of JPS5231655A publication Critical patent/JPS5231655A/en
Publication of JPS5922339B2 publication Critical patent/JPS5922339B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

PURPOSE: Automatic measurement of photo-resist film thickness distribution on braun tube by detecting ultraviolet ray absorption factor.
COPYRIGHT: (C)1977,JPO&Japio
JP10693275A 1975-09-05 1975-09-05 Photoresist film thickness measuring device Expired JPS5922339B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10693275A JPS5922339B2 (en) 1975-09-05 1975-09-05 Photoresist film thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10693275A JPS5922339B2 (en) 1975-09-05 1975-09-05 Photoresist film thickness measuring device

Publications (2)

Publication Number Publication Date
JPS5231655A true JPS5231655A (en) 1977-03-10
JPS5922339B2 JPS5922339B2 (en) 1984-05-25

Family

ID=14446163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10693275A Expired JPS5922339B2 (en) 1975-09-05 1975-09-05 Photoresist film thickness measuring device

Country Status (1)

Country Link
JP (1) JPS5922339B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62114228U (en) * 1986-01-09 1987-07-21

Also Published As

Publication number Publication date
JPS5922339B2 (en) 1984-05-25

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