JPS5231368B1 - - Google Patents
Info
- Publication number
- JPS5231368B1 JPS5231368B1 JP45031229A JP3122970A JPS5231368B1 JP S5231368 B1 JPS5231368 B1 JP S5231368B1 JP 45031229 A JP45031229 A JP 45031229A JP 3122970 A JP3122970 A JP 3122970A JP S5231368 B1 JPS5231368 B1 JP S5231368B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP45031229A JPS5231368B1 (ja) | 1970-04-14 | 1970-04-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP45031229A JPS5231368B1 (ja) | 1970-04-14 | 1970-04-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5231368B1 true JPS5231368B1 (ja) | 1977-08-15 |
Family
ID=12325571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP45031229A Pending JPS5231368B1 (ja) | 1970-04-14 | 1970-04-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5231368B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0626246U (ja) * | 1982-09-01 | 1994-04-08 | エヌ・ベー・フィリップス・フルーイランペンファブリケン | X線リトグラフィによりパターンをラッカー層に形成するマスク |
-
1970
- 1970-04-14 JP JP45031229A patent/JPS5231368B1/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0626246U (ja) * | 1982-09-01 | 1994-04-08 | エヌ・ベー・フィリップス・フルーイランペンファブリケン | X線リトグラフィによりパターンをラッカー層に形成するマスク |