JPS5231194B2 - - Google Patents
Info
- Publication number
- JPS5231194B2 JPS5231194B2 JP8438572A JP8438572A JPS5231194B2 JP S5231194 B2 JPS5231194 B2 JP S5231194B2 JP 8438572 A JP8438572 A JP 8438572A JP 8438572 A JP8438572 A JP 8438572A JP S5231194 B2 JPS5231194 B2 JP S5231194B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8438572A JPS5231194B2 (show.php) | 1972-08-23 | 1972-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8438572A JPS5231194B2 (show.php) | 1972-08-23 | 1972-08-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4940777A JPS4940777A (show.php) | 1974-04-16 |
| JPS5231194B2 true JPS5231194B2 (show.php) | 1977-08-12 |
Family
ID=13829079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8438572A Expired JPS5231194B2 (show.php) | 1972-08-23 | 1972-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5231194B2 (show.php) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55129345A (en) * | 1979-03-29 | 1980-10-07 | Ulvac Corp | Electron beam plate making method by vapor phase film formation and vapor phase development |
-
1972
- 1972-08-23 JP JP8438572A patent/JPS5231194B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4940777A (show.php) | 1974-04-16 |