JPS5230096B2 - - Google Patents
Info
- Publication number
- JPS5230096B2 JPS5230096B2 JP47038538A JP3853872A JPS5230096B2 JP S5230096 B2 JPS5230096 B2 JP S5230096B2 JP 47038538 A JP47038538 A JP 47038538A JP 3853872 A JP3853872 A JP 3853872A JP S5230096 B2 JPS5230096 B2 JP S5230096B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47038538A JPS5230096B2 (https=) | 1972-04-17 | 1972-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47038538A JPS5230096B2 (https=) | 1972-04-17 | 1972-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS491141A JPS491141A (https=) | 1974-01-08 |
| JPS5230096B2 true JPS5230096B2 (https=) | 1977-08-05 |
Family
ID=12528048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47038538A Expired JPS5230096B2 (https=) | 1972-04-17 | 1972-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5230096B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6171955A (ja) * | 1984-09-12 | 1986-04-12 | Toshiba Corp | 研磨方法及びその装置 |
-
1972
- 1972-04-17 JP JP47038538A patent/JPS5230096B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS491141A (https=) | 1974-01-08 |