JPS5229242B2 - - Google Patents

Info

Publication number
JPS5229242B2
JPS5229242B2 JP2537172A JP2537172A JPS5229242B2 JP S5229242 B2 JPS5229242 B2 JP S5229242B2 JP 2537172 A JP2537172 A JP 2537172A JP 2537172 A JP2537172 A JP 2537172A JP S5229242 B2 JPS5229242 B2 JP S5229242B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2537172A
Other languages
Japanese (ja)
Other versions
JPS4893527A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2537172A priority Critical patent/JPS5229242B2/ja
Publication of JPS4893527A publication Critical patent/JPS4893527A/ja
Publication of JPS5229242B2 publication Critical patent/JPS5229242B2/ja
Expired legal-status Critical Current

Links

JP2537172A 1972-03-13 1972-03-13 Expired JPS5229242B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2537172A JPS5229242B2 (enExample) 1972-03-13 1972-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2537172A JPS5229242B2 (enExample) 1972-03-13 1972-03-13

Publications (2)

Publication Number Publication Date
JPS4893527A JPS4893527A (enExample) 1973-12-04
JPS5229242B2 true JPS5229242B2 (enExample) 1977-08-01

Family

ID=12163961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2537172A Expired JPS5229242B2 (enExample) 1972-03-13 1972-03-13

Country Status (1)

Country Link
JP (1) JPS5229242B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10962766B2 (en) 2019-01-03 2021-03-30 Microsoft Technology Licensing, Llc Adhesive bonded micro electro mechanical system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10962766B2 (en) 2019-01-03 2021-03-30 Microsoft Technology Licensing, Llc Adhesive bonded micro electro mechanical system

Also Published As

Publication number Publication date
JPS4893527A (enExample) 1973-12-04

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