JPS5229242B2 - - Google Patents
Info
- Publication number
- JPS5229242B2 JPS5229242B2 JP2537172A JP2537172A JPS5229242B2 JP S5229242 B2 JPS5229242 B2 JP S5229242B2 JP 2537172 A JP2537172 A JP 2537172A JP 2537172 A JP2537172 A JP 2537172A JP S5229242 B2 JPS5229242 B2 JP S5229242B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2537172A JPS5229242B2 (en:Method) | 1972-03-13 | 1972-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2537172A JPS5229242B2 (en:Method) | 1972-03-13 | 1972-03-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4893527A JPS4893527A (en:Method) | 1973-12-04 |
| JPS5229242B2 true JPS5229242B2 (en:Method) | 1977-08-01 |
Family
ID=12163961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2537172A Expired JPS5229242B2 (en:Method) | 1972-03-13 | 1972-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5229242B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10962766B2 (en) | 2019-01-03 | 2021-03-30 | Microsoft Technology Licensing, Llc | Adhesive bonded micro electro mechanical system |
-
1972
- 1972-03-13 JP JP2537172A patent/JPS5229242B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10962766B2 (en) | 2019-01-03 | 2021-03-30 | Microsoft Technology Licensing, Llc | Adhesive bonded micro electro mechanical system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4893527A (en:Method) | 1973-12-04 |