JPS5228634B2 - - Google Patents
Info
- Publication number
- JPS5228634B2 JPS5228634B2 JP581973A JP581973A JPS5228634B2 JP S5228634 B2 JPS5228634 B2 JP S5228634B2 JP 581973 A JP581973 A JP 581973A JP 581973 A JP581973 A JP 581973A JP S5228634 B2 JPS5228634 B2 JP S5228634B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02463—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02466—Antimonides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02469—Group 12/16 materials
- H01L21/02477—Selenides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02549—Antimonides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Light Receiving Elements (AREA)
- Bipolar Transistors (AREA)
- Led Devices (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US21637672A | 1972-01-10 | 1972-01-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS504977A JPS504977A (en) | 1975-01-20 |
| JPS5228634B2 true JPS5228634B2 (en) | 1977-07-27 |
Family
ID=22806816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP581973A Expired JPS5228634B2 (en) | 1972-01-10 | 1973-01-10 |
Country Status (10)
| Country | Link |
|---|---|
| JP (1) | JPS5228634B2 (en) |
| AU (1) | AU466927B2 (en) |
| BE (1) | BE793800A (en) |
| CA (1) | CA973976A (en) |
| DE (1) | DE2300921A1 (en) |
| FR (1) | FR2167831B1 (en) |
| GB (1) | GB1417484A (en) |
| IT (1) | IT978097B (en) |
| NL (1) | NL7300350A (en) |
| SE (1) | SE387473B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264272A (en) * | 1975-11-22 | 1977-05-27 | Fujitsu Ltd | Semiconductor crystal |
| CA1256590A (en) * | 1985-03-15 | 1989-06-27 | Yuichi Matsui | Compound semiconductor device with layers having different lattice constants |
| GB2215514A (en) * | 1988-03-04 | 1989-09-20 | Plessey Co Plc | Terminating dislocations in semiconductor epitaxial layers |
| JP2588280B2 (en) * | 1989-07-10 | 1997-03-05 | シャープ株式会社 | Compound semiconductor light emitting device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3493811A (en) * | 1966-06-22 | 1970-02-03 | Hewlett Packard Co | Epitaxial semiconductor material on dissimilar substrate and method for producing the same |
-
0
- BE BE793800D patent/BE793800A/en unknown
-
1973
- 1973-01-09 CA CA160,857A patent/CA973976A/en not_active Expired
- 1973-01-09 GB GB110773A patent/GB1417484A/en not_active Expired
- 1973-01-09 FR FR7300559A patent/FR2167831B1/fr not_active Expired
- 1973-01-09 DE DE19732300921 patent/DE2300921A1/en active Pending
- 1973-01-10 IT IT1913773A patent/IT978097B/en active
- 1973-01-10 JP JP581973A patent/JPS5228634B2/ja not_active Expired
- 1973-01-10 SE SE7300295A patent/SE387473B/en unknown
- 1973-01-10 NL NL7300350A patent/NL7300350A/xx unknown
- 1973-01-10 AU AU50942/73A patent/AU466927B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SE387473B (en) | 1976-09-06 |
| FR2167831A1 (en) | 1973-08-24 |
| NL7300350A (en) | 1973-07-12 |
| BE793800A (en) | 1973-05-02 |
| JPS504977A (en) | 1975-01-20 |
| CA973976A (en) | 1975-09-02 |
| IT978097B (en) | 1974-09-20 |
| DE2300921A1 (en) | 1973-07-19 |
| AU466927B2 (en) | 1975-11-13 |
| FR2167831B1 (en) | 1977-12-30 |
| AU5094273A (en) | 1974-07-11 |
| GB1417484A (en) | 1975-12-10 |